Micro-Epsilon Laser Triangulation Principle
Transmitting, receiving imaging and distance measurement after calibration
Verification date: 2026-10-24
View original public information →LSP077 · Electronic and semiconductor assembly height · PCB blank board and electronic assembly
Partially reusable
High consistency check of fixture support surfaces
Facing the wafer handling fixture, the point laser triangular displacement is used as the observation route, and the height difference of the support point is intended to be output. The page is for project evaluation and does not mean that the development has been completed or has been accepted on site.
Project Judgment Summary
Product/DeviceWafer handling fixture
Measure routeTRI·Point laser triangular displacement
Ability GradingPartially reusable
Verification statusThe actual machine/product domain acceptance of this scenario has not been carried out
Scene nature:Similar potential application scenarios for laser spots. The potential application scenario has not yet been developed into a complete product system; the actual machine/product domain acceptance of this scenario has not been carried out. The actual product/product domain acceptance quantity in catalog statistics is 0.
Business tasks and intended output
- target audience
- Wafer handling fixture: point laser triangular displacement
- pseudo output
- Support point height difference
- Applicable conditions
- Formal flatness evaluation core needs to be added
- priority
- General extension. Verification needs to be completed according to the listed optical conditions, calibration and samples.
Imaging input and algorithm routing
Imaging and device conditions
By fixing the laser emission axis and the receiving camera baseline, separable light spots can be formed on the target surface. Fixed baseline point laser receiving head and calibration Z platform
TRI·Point laser triangular displacement
By fixing the laser emission axis and the receiving camera baseline, the target surface can form separable light spots.
- A97Weighted least squares linear calibration
- A100First-order sensitivity uncertainty propagation
- A101Adaptive threshold laser spot grayscale centroid
- A103Logarithmic quadratic surface sub-pixel spot center
- A107Laser spot quality and usability diagnostics
Existing algorithmic evidence:A101–A112 only complete analytical synthesis spot and controlled geometry verification; see laser_spot_benchmark.json
Current capabilities and capabilities to be supplemented
Partially reusable
Requires calibration, synchronization or integration
The light point detection front-end or timing statistics module can be reused, but the project still needs to add geometric calibration, time synchronization, motion compensation or equipment system integration.
Gaps in this scenario:It is necessary to add point laser ray intersection or one-dimensional nonlinear distance calibration adaptation; A97 only has a linear area, and A21 is a laser plane interface. Formal flatness evaluation core needs to be added. The surface reflection of the actual machine and the small measuring range determine whether the effective point can be collected.
Route-level gaps:It is necessary to add point laser ray intersection or one-dimensional nonlinear distance calibration adaptation; A97 is only in the linear area, and A21 is the laser plane interface
"Partially reusable" only describes the relative development volume and does not constitute a commitment to accuracy, tempo, stability or delivery time.
Verification methods and acceptance prerequisites
Use gauge blocks and stages to cover range and surface conditions and independently report physical error, repeatability, and speckle effects. Gauge block, microscopic height gauge and independent assembly sample comparison
| Acceptance items | Evidence required for project confirmation | Current status |
|---|---|---|
| Inputs and samples | Real device original frames, normal/abnormal samples, exposure and light path conditions, sample grouping and set aside | Not provided, waiting for project input |
| Magnitude and Error | Independent reference value, calibration record, error statistical caliber and mutual confirmation threshold | Not verified |
| Exceptions and boundaries | Anticipated handling of missed detections, false detections, overexposure, occlusion, reflection, out-of-view and communication abnormalities | To be defined |
| System integration | Interface, time synchronization, deployment platform, tempo, log, version and continuous running record | Not integrated |
Evidence sources and citation boundaries
The source supports measurement principles or similar applications; the module combination, device and acceptance method in this scenario are engineering derivation, and product verification has not been completed.
Micro-Epsilon displacement applications
Industrial height, distance and position measurement categories
Verification date: 2026-10-24
View original public information →NIST 3D Imaging Technology Description
Active point triangulation, scanned geometry and error propagation
Verification date: 2026-10-24
View original public information →Source usage scope:The public information is used to support the measurement principle or the existence of similar applications, and does not prove that this scenario has been developed, deployed or accepted by Jishi Technology.
Project consultation
xuzhiyang0928@gmail.com
Define the Development Scope with Samples and Device Requirements
High consistency check of fixture support surfaces
Please describe the task object, original picture or video, target indicators, device platform, interface and sample situation.
Phone: 13910119357xuzhiyang0928@gmail.com