How Nanosurf AFM works
Reflected light spot, cantilever beam deflection and sensitivity calibration
Verification date: 2026-10-24
View original public information →LSP225 · MEMS and cantilever beam devices · MEMS and microelectromechanical devices
Partially reusable
Light point calibration of static driving angle
Facing the MEMS reflector, using the reflection optical lever angle as the observation route, the proposed output voltage and reflection angle candidates are used. The page is for project evaluation and does not mean that the development has been completed or has been accepted on site.
Project Judgment Summary
Product/DeviceMEMS mirror
Measure routeANGLE · Reflective optical lever angle
Ability GradingPartially reusable
Verification statusThe actual machine/product domain acceptance of this scenario has not been carried out
Scene nature:Similar potential application scenarios for laser spots. The potential application scenario has not yet been developed into a complete product system; the actual machine/product domain acceptance of this scenario has not been carried out. The actual product/product domain acceptance quantity in catalog statistics is 0.
Business tasks and intended output
- target audience
- MEMS Mirrors: Reflective Optical Leverage Angle
- pseudo output
- Voltage and reflection angle candidates
- Applicable conditions
- Test voltage hysteresis and cross-axis coupling
- priority
- General extension. Verification needs to be completed according to the listed optical conditions, calibration and samples.
Imaging input and algorithm routing
Imaging and device conditions
Fix the incident light and reflector, and calibrate the corresponding relationship between the camera/receiving screen and the angle stage. Microscopic focusing of incident light, reflection reception and independently driven reference
ANGLE · Reflective optical lever angle
Fix the incident light and reflector, and calibrate the corresponding relationship between the camera/receiving screen and the angle stage
- A101Adaptive threshold laser spot grayscale centroid
- A103Logarithmic quadratic surface sub-pixel spot center
- A107Laser spot quality and usability diagnostics
- A109Two-dimensional pixel to physical coordinate polynomial calibration
- A110laser spot calibration mapping and covariance propagation
- A112Laser spot two-dimensional repeatability and coverage ellipse
Existing algorithmic evidence:A101–A112 only complete analytical synthesis spot and controlled geometry verification; see laser_spot_benchmark.json
Current capabilities and capabilities to be supplemented
Partially reusable
Requires calibration, synchronization or integration
The light point detection front-end or timing statistics module can be reused, but the project still needs to add geometric calibration, time synchronization, motion compensation or equipment system integration.
Gaps in this scenario:Optical lever geometry, reflection double angle relationship and incident point movement compensation are required; mirror angle and target translation must be separated. Voltage hysteresis and cross-axis coupling shall be tested. The camera only covers the frequency bands supported by its sampling and exposure
Route-level gaps:Optical lever geometry, reflection double angle relationship and incident point movement compensation are required; mirror angle and target translation must be separated
"Partially reusable" only describes the relative development volume and does not constitute a commitment to accuracy, tempo, stability or delivery time.
Verification methods and acceptance prerequisites
Use an independent angle stage/autocollimator to conduct bidirectional and multi-attitude tests, and report the angle error and return difference. Independent angle/displacement meter and drive sweep comparison
| Acceptance items | Evidence required for project confirmation | Current status |
|---|---|---|
| Inputs and samples | Real device original frames, normal/abnormal samples, exposure and light path conditions, sample grouping and set aside | Not provided, waiting for project input |
| Magnitude and Error | Independent reference value, calibration record, error statistical caliber and mutual confirmation threshold | Not verified |
| Exceptions and boundaries | Anticipated handling of missed detections, false detections, overexposure, occlusion, reflection, out-of-view and communication abnormalities | To be defined |
| System integration | Interface, time synchronization, deployment platform, tempo, log, version and continuous running record | Not integrated |
Evidence sources and citation boundaries
The source supports measurement principles or similar applications; the module combination, device and acceptance method in this scenario are engineering derivation, and product verification has not been completed.
Newport fast reflex mirror and active beam stabilization technology
System principles of position drift, pointing drift and active compensation
Verification date: 2026-10-24
View original public information →Source usage scope:The public information is used to support the measurement principle or the existence of similar applications, and does not prove that this scenario has been developed, deployed or accepted by Jishi Technology.
Project consultation
xuzhiyang0928@gmail.com
Define the Development Scope with Samples and Device Requirements
Light point calibration of static driving angle
Please describe the task object, original picture or video, target indicators, device platform, interface and sample situation.
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